SEMI標準中有材料（M系列）、設備（F系列）、平板顯示器（D系列）、跟蹤性（T系列）等，其中S系列規定了環境健康安全（EHS）的要求。

SEMI常見安全標準

SEMI S1 ⋯⋯裝置安全標簽   Safety Guideline for Visual Hazard Alerts

SEMI S2 ⋯⋯半導體生產裝置的環境、健康、安全Safety Guidelines for Semiconductor Manufacturing Equipment

SEMI S3 ⋯⋯熱化學槽的安全性 Safety Guidelines for Heated Chemical Baths

SEMI S4 ⋯⋯櫥柜收納高壓氣筒的隔離／分離Safety Guideline for the Segregation/ Separation of Gas Cylinders Contained in Cabinets

SEMI S5 ⋯⋯流量限制設備Safety Guideline for Flow Limiting Devices

SEMI S6 ⋯⋯換氣Safety Guideline for Ventilation

SEMI S7 ⋯⋯半導體生產裝置的環境、健康、及安全性（ESH）評價Safety Guidelines for Environmental,Safety and Health Evaluation of Semiconductor Manufacturing Equipment

SEMI S8 ⋯⋯半導體生產裝置的人機工程學Safety Guidelines for Ergonomics/Human Factors Engineering of Semiconductor Manufacturing Equipment

SEMI S9 ⋯⋯半導體生產裝置的電氣設計驗證試驗Electrical Test Methods for Semiconductor Manufacturing Equipment

SEMI S10 ⋯⋯風險核查Safety Guideline for Risk Assessment

SEMI S11 ⋯⋯半導體生產裝置的小環境的環境、安全性及健康Environmental, Safety, and Health Guidelines for Semiconductor Manufacturing Equipment Minienvironments

SEMI S12 ⋯⋯裝置的去污Guidelines for Equipment Decontamination

SEMI S13 ⋯⋯半導體生產裝置的操作及維護手冊Safety Guidelines for Operation and Maintenance Manuals Used with Semiconductor Manufacturing Equipment

SEMI S14 ⋯⋯對半導體生產裝置的火災風險評估和降低Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment

SEMI S15 ⋯⋯有毒及易燃氣體的檢測系統評價Safety Guidelines for the Evaluation of Toxic and Flammable Gas Detection Systems

SEMI F47 ⋯⋯電壓瞬變能力規范 Voltage Sag Standard